Technical details of the project

A special feature of the project was that both single-wafer processes and batch processes can run in Beneq Oy‘s ALD systems. As an universal framework for machine control, the ToolCommander^® supports various systems - including batch, cluster and inline systems. The existing functions and the user interface of the ToolCommander® therefore served as the basis for integrating the Beneq Oy Beckhoff PLC to control ALD processes. The Beckhoff TwinCAT protocol was used for communication between ToolComander^® and the Beckhoff PLC. By using a decentralized I/O terminal and various TCP/IP interfaces, components such as load locks and the pump unit were directly controlled.

For vertical host integration, the Chinese end customer defined their own interface protocol, which was similar to SECS/GEM standards, but also included customer-specific functions. On this basis, susietec® experts developed an additional adapter. Horizontal integration into the main cluster was achieved through a CC-Link interface.

Customer benefits

The first phase of the project included an equipment control specification, which was carried out in close cooperation with Beneq Oy. As part of this specification process, various test scenarios were also defined. Prior to delivery, an in-house test was carried out using the simulation options of the ToolCommander^®. This included regular exchange of ideas and experience with developers at Beneq Oy as well. Six months after the start of the project, the system was shipped to China and put into operation on site.